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MX2000IR • For inspecting medium and large lots in semiconductor manufacture • Application scope includes MEMS, wafer bonds and flip chips, as well as photovoltaic products • Wafers are loaded for inspection and unloaded by a robot • Wafer identification and prealignment are done parallel to inspection • Patented Si-Thru technology, whose light sources generate efficient illumination in the nearinfrared range Viscom www.viscom.com
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